Brand: Ultratech
Model: simply ALD
Features:
Precursors: Ozone, Diethyl-Zinc (DEZ), Tetrakis(dimethylamino)hafnium (TDMAH), H2O, MeCpPtMe3
PC Software: Savannah
Location: Room 502 (Maydan)
Brand: Ultratech
Model: simply ALD
Features:
Precursors: Ozone, Diethyl-Zinc (DEZ), Tetrakis(dimethylamino)hafnium (TDMAH), H2O, MeCpPtMe3
PC Software: Savannah
Location: Room 502 (Maydan)