ALD – Atomic Layer Deposition

Atomic Layer Deposition
Ultratech “simply ALD”

Brand: Ultratech

Model: simply ALD

Features:

Precursors: Ozone, Diethyl-Zinc (DEZ), Tetrakis(dimethylamino)hafnium (TDMAH), H2O, MeCpPtMe3

PC Software: Savannah

Location: Room 502 (Maydan)